2020.11.24

11月24日~26日にオンライン開催されたICPE2020にて、当研究室の8人が研究発表を行いました。

当研究室より下記の研究発表を行いました。
http://www-nms.prec.eng.osaka-u.ac.jp/results/

楊旭(特任助教):
Obtaining of atomically smooth 4H-SiC (0001) surface by optimizing anodic oxidation parameters in slurryless electrochemical mechanical polishing
楊暁喆(D3、JSPS DC2):
Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface
劉念(D3):
Gas composition dependence of material removal rate in plasma assisted polishing of single crystal diamond
孫栄硯(D2、JSPS DC1):
Roughness evaluation of sintered AlN surface processed by plasma-assisted polishing using diamond grinding stone
越智諒(M2):
Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation and Its Characterization
三栗野諒(M2):
Formation of Trench Pattern on Ge Surface by Enhanced Chemical Etching Using Chemically Modified Graphene Flakes
馬智達(M1):
Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires
杉田祥吾(M1):
Reproducible formation of graphene nanopore within 10 nm using helium ion microscope

参加されたみなさまお疲れ様でした!