Article about plasma-assisted polishing of diamond wafer was published in the Nikkan Kogyo Shimbun (December 22, morning edition, page 30).

Article about plasma-assisted polishing of diamond wafer was published in the Nikkan Kogyo Shimbun (December 22, morning edition, page 30).

ダイヤモンド基板、損傷なく研磨　ティ・ディ・シー、研究機関向け受託加工
https://www.nikkan.co.jp/articles/view/00582637?gnr_footer=0056750