2020.11.24

At ICPE2020, which was held online from Nov. 24th to 26th, eight of our laboratory gave a research presentation.

The following research presentations were made by our laboratory members.
http://www-nms.prec.eng.osaka-u.ac.jp/en/results/
Xu YANG (Assistant Professor):
Xu. Yang, X. Yang, K. Kawai, K. Arima, K. Yamamura
Obtaining of atomically smooth 4H-SiC (0001) surface by optimizing anodic oxidation parameters in slurryless electrochemical mechanical polishing
Xiaozhe YANG (D3, JSPS DC2):
X. Yang, Xu. Yang, K. Kawai, K. Arima, K. Yamamura
Effects of ultrasonic vibration on slurryless electrochemical mechanical polishing of 4H-SiC (0001) surface
Nian LIU (D3)
N. Liu, N. Yoshitaka, K. Sugawara, H. Yamada, D. Takeuchi, Y. Akabane, K. Fujino, K. Kawai, K. Arima, K. Yamamura
Gas composition dependence of material removal rate in plasma assisted polishing of single crystal diamond
Rongyan SUN (D2, JSPS DC1):
R. Sun, K. Arima, K. Kawai, K. Yamamura
Roughness evaluation of sintered AlN surface processed by plasma-assisted polishing using diamond grinding stone
Ryo OCHI (M2):
M. Ochi, O. Minami, Y. Sano, K. Kawai, K. Yamamura, K. Arima
Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation and Its Characterization
Ryo MIKURINO (M2):
R. Mikurino, A. Ogasawara, T. Hirano, K. Kawai, K. Yamamura, K. Arima
Formation of Trench Pattern on Ge Surface by Enhanced Chemical Etching Using Chemically Modified Graphene Flakes
Zhida MA (M1):
Z. Ma, S. Masumoto, K. Kawai, K. Yamamura, K. Arima
Nano-Groove Formation on Si(111) Surfaces by Chemical Etching Assisted by Ag Nanowires
Shogo SUGITA (M1):
S. Sugita, T. Tsuji, K. Arima, K. Yamamura, K. Kawai
Reproducible formation of graphene nanopore within 10 nm using helium ion microscope